Title :
Design model for bulk CMOS scaling enabling accurate latch-up prediction
Author :
Wieder, Armin W. ; Werner, Christoph ; Harter, Johann
Author_Institution :
Siemens AG, Munich, F.R.Germany
Abstract :
An a priori model for CMOS design including latch-up prediction is presented. It is based on rigorous numerical 2-D simulations as well as on experimental data and gives accurate bulk-CMOS-scaling rules.
Keywords :
CMOS technology; Charge carrier processes; Doping; Laboratories; Latches; Numerical simulation; Poisson equations; Predictive models; Semiconductor device modeling; Thyristors;
Conference_Titel :
Electron Devices Meeting, 1981 International
DOI :
10.1109/IEDM.1981.190086
