DocumentCode
3555569
Title
Emerging technology in chemically-sensitive field effect transistor (CHEMFET) devices
Author
Cheung, Peter W.
Author_Institution
Case Western Reserve University, Cleveland, Ohio
Volume
27
fYear
1981
fDate
1981
Firstpage
466
Lastpage
466
Keywords
Chemical processes; Chemical sensors; Chemical technology; Chemical transducers; FETs; Impedance; Integrated circuit reliability; Laboratories; MISFETs; Signal processing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Type
conf
DOI
10.1109/IEDM.1981.190117
Filename
1482070
Link To Document