DocumentCode :
3555569
Title :
Emerging technology in chemically-sensitive field effect transistor (CHEMFET) devices
Author :
Cheung, Peter W.
Author_Institution :
Case Western Reserve University, Cleveland, Ohio
Volume :
27
fYear :
1981
fDate :
1981
Firstpage :
466
Lastpage :
466
Keywords :
Chemical processes; Chemical sensors; Chemical technology; Chemical transducers; FETs; Impedance; Integrated circuit reliability; Laboratories; MISFETs; Signal processing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1981 International
Type :
conf
DOI :
10.1109/IEDM.1981.190117
Filename :
1482070
Link To Document :
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