Title :
Emerging technology in chemically-sensitive field effect transistor (CHEMFET) devices
Author :
Cheung, Peter W.
Author_Institution :
Case Western Reserve University, Cleveland, Ohio
Keywords :
Chemical processes; Chemical sensors; Chemical technology; Chemical transducers; FETs; Impedance; Integrated circuit reliability; Laboratories; MISFETs; Signal processing;
Conference_Titel :
Electron Devices Meeting, 1981 International
DOI :
10.1109/IEDM.1981.190117
