DocumentCode
3555585
Title
Perspective of scaled bipolar devices
Author
Hanaoka, Norie ; Anzai, Akio
Author_Institution
Hitachi Ltd., Tokyo, Japan
Volume
27
fYear
1981
fDate
1981
Firstpage
512
Lastpage
515
Abstract
To predict the performance of future bipolar VLSIs, practical 2-dimensional device simulator has been developed, in which bandgap narrowing and Auger recombination at high impurity concentration are taken into consideration, and in which the conductivity modulation caused by excess minority carriers is modelled analytically. Procedure for optimizing the vertical transistor structures is described in terms of breakdown voltage. Relation between base impurity concentration and base width to give a necessary breakdown voltage is obtained from the numerical analysis including statistical doping fluctuations. According to the simulation of ECL circuit with 3V power supply, less than 100pS per gate is achievable when the device is scaled down to 0.5µm emitter stripe width and 0.056µm base width. It is concluded that the performance of submicron bipolar devices is enough competitive with that of GaAs MESFET devices.
Keywords
Analytical models; Conductivity; Doping; Impurities; Numerical analysis; Performance analysis; Photonic band gap; Predictive models; Semiconductor process modeling; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Type
conf
DOI
10.1109/IEDM.1981.190132
Filename
1482085
Link To Document