Title :
Session 24 Device technology — Advanced CMOS technology
Author :
Parrillo, L.C. ; Geipel, H.J.
Author_Institution :
Bell Laboratories, Murray Hill, NJ, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1981 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1981.190137
