DocumentCode
3555617
Title
Radiation-hard 16K CMOS/SOS clocked static RAM
Author
Gupta, A. ; Li, M.F. ; Yu, K.K. ; Su, S.C. ; Pandya, P. ; Yang, H.B.
Author_Institution
Hughes Aircraft Company, Newport Beach, California
Volume
27
fYear
1981
fDate
1981
Firstpage
616
Lastpage
619
Abstract
A low-temperature, radiation-hard, 2.21µM channel length, CMOS/SOS process has been developed for a 5V power-supply, 16K clocked static RAM, with a standard six-transistor cell configuration. The well-known edge leakage problem in mesa-isolated N-channel SOS transistors has been eliminated. At VDD of 5V, the 16K RAM has typical access times of 150 nsecs and 110 nsecs with phosphorus doped polysilicon and tantalum silicide gates, respectively; the static power dissipation is 35µW and the operating power is 20 mW at 3 MHz.
Keywords
CMOS process; CMOS technology; Clocks; Conductivity; Electric breakdown; Random access memory; Read-write memory; Silicides; Silicon; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Type
conf
DOI
10.1109/IEDM.1981.190160
Filename
1482113
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