Title :
Sealed-interface local oxidation technology
Author :
Hui, J. ; Chiu, T.Y. ; Wong, S. ; Oldham, W.G.
Author_Institution :
University of California, Berkeley, California
Keywords :
Argon; Implants; Laboratories; Lead compounds; Oxidation; Stress;
Conference_Titel :
Electron Devices Meeting, 1981 International
DOI :
10.1109/IEDM.1981.190188
