DocumentCode
3555649
Title
A vertically isolated self-aligned transistor
Author
Takemoto, T. ; Fujita, T. ; Kawakita, K. ; Sakai, H. ; Komeda, T.
Author_Institution
Matsushita Electric Industry Co., Ltd., Osaka, Japan
Volume
27
fYear
1981
fDate
1981
Firstpage
708
Lastpage
709
Keywords
Coatings; Etching; Laboratories; Large scale integration; Oxidation; Power dissipation; Semiconductor films; Semiconductor impurities; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1981 International
Type
conf
DOI
10.1109/IEDM.1981.190190
Filename
1482143
Link To Document