Title :
Session 3 Device technology — Insulators and isolation
Author :
Fair, R.B. ; Schwettmann, F.
Author_Institution :
Research Triangle Institute, Research Triangle Park, NC, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1982 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1982.190206
