Title :
Session 24 Device technology — Advanced interconnect technologies
Author :
Parrillo, L.C. ; Minagawa, S.
Author_Institution :
Bell Laboratories, Murray Hill, NJ
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1982 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1982.190349
