DocumentCode

3555956

Title

A corrugated capacitor cell (CCC) for megabit dynamic MOS memories

Author

Sunami, H. ; Kure, T. ; Hashimoto, N. ; Itoh, K. ; Toyabe, T. ; Asai, S.

Author_Institution

Hitachi Ltd., Kokubunji, Tokyo, Japan

Volume

28

fYear

1982

fDate

1982

Firstpage

806

Lastpage

808

Keywords

Capacitance; Charge carrier lifetime; Dry etching; Insulation; Laboratories; MOS capacitors; Physics; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1982 International

Type

conf

DOI

10.1109/IEDM.1982.190421

Filename

1482955