Title :
Monolithic integrated zinc-oxide on silicon pyroelectric anemometer
Author :
Polla, D.L. ; Muller, R.S. ; White, R.M.
Author_Institution :
University of California, Berkeley, California
Abstract :
Thin films of pyroelectric ZnO have been combined wlth NMOS planar tech nology to produce a fully integrated anemometer. The anemometer is based on the differential cooling rate of two heat sensors placed up- and downstream from a heat source. The heat sensors for the anemometer consist of 2 µm-thick sputtered ZnO pyroelectric capacitors encapsulated in silicon dioxide. Sense electrodes on the capacitors are connected directly to differentially coupled depletion-mode MOSFET pairs.
Keywords :
Capacitive sensors; Capacitors; Cooling; Fluid flow measurement; MOS devices; Pyroelectricity; Silicon; Sputtering; Thermal sensors; Zinc oxide;
Conference_Titel :
Electron Devices Meeting, 1983 International
DOI :
10.1109/IEDM.1983.190588
