DocumentCode
3556128
Title
Monolithic integrated zinc-oxide on silicon pyroelectric anemometer
Author
Polla, D.L. ; Muller, R.S. ; White, R.M.
Author_Institution
University of California, Berkeley, California
Volume
29
fYear
1983
fDate
1983
Firstpage
639
Lastpage
642
Abstract
Thin films of pyroelectric ZnO have been combined wlth NMOS planar tech nology to produce a fully integrated anemometer. The anemometer is based on the differential cooling rate of two heat sensors placed up- and downstream from a heat source. The heat sensors for the anemometer consist of 2 µm-thick sputtered ZnO pyroelectric capacitors encapsulated in silicon dioxide. Sense electrodes on the capacitors are connected directly to differentially coupled depletion-mode MOSFET pairs.
Keywords
Capacitive sensors; Capacitors; Cooling; Fluid flow measurement; MOS devices; Pyroelectricity; Silicon; Sputtering; Thermal sensors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1983 International
Type
conf
DOI
10.1109/IEDM.1983.190588
Filename
1483713
Link To Document