Title :
A self-aligned 1- µm CMOS technology for VLSI
Author :
Hu, G.J. ; Taur, Y. ; Dennard, R.H. ; Terman, L.M. ; Ting, C.Y.
Author_Institution :
Xerox Corporation, Palo Alto, California
Keywords :
CMOS technology; Very large scale integration;
Conference_Titel :
Electron Devices Meeting, 1983 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1983.190615
