Title :
Charge coupled devices for X-ray imaging
Author :
Wadsworth, M. ; McGrath, R.D.
Author_Institution :
Texas Instruments, Dallas, Texas
Abstract :
This talk reviews recent advances in the development of charge coupled devices (CCD) suitable for use as x-ray imagers over the energy range of 0.4 keV to 10 keV. Previously reported data will be analyzed in terms of spatial resolution, spectral resolution, and quantum efficiency. Correlations will be made between device performance and device design options.
Keywords :
Charge coupled devices; Charge-coupled image sensors; Clouds; Dark current; Electrons; Energy resolution; Image resolution; Optical imaging; Spatial resolution; X-ray imaging;
Conference_Titel :
Electron Devices Meeting, 1984 International
DOI :
10.1109/IEDM.1984.190631