Title :
Hot carriers in small geometry CMOS
Author :
Akers, Lex A. ; Holly, Mary A. ; Lund, Clarence
Author_Institution :
Arizona State University, Tempe, AZ
Abstract :
The effects of hot carriers on the electrical behavior of small geometry NMOS and PMOS devices are reported. Significant changes in device characteristics are shown to occur even at drain voltages scaled to 3 volts. Scaling the width is shown to cause enhanced hot carrier effects.
Keywords :
Electrical resistance measurement; Geometry; Hot carrier effects; Hot carriers; MOS devices; Plasma applications; Plasma devices; Stability; Testing; Voltage;
Conference_Titel :
Electron Devices Meeting, 1984 International
DOI :
10.1109/IEDM.1984.190647
