DocumentCode
3556194
Title
Hot carriers in small geometry CMOS
Author
Akers, Lex A. ; Holly, Mary A. ; Lund, Clarence
Author_Institution
Arizona State University, Tempe, AZ
Volume
30
fYear
1984
fDate
1984
Firstpage
80
Lastpage
83
Abstract
The effects of hot carriers on the electrical behavior of small geometry NMOS and PMOS devices are reported. Significant changes in device characteristics are shown to occur even at drain voltages scaled to 3 volts. Scaling the width is shown to cause enhanced hot carrier effects.
Keywords
Electrical resistance measurement; Geometry; Hot carrier effects; Hot carriers; MOS devices; Plasma applications; Plasma devices; Stability; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1984 International
Type
conf
DOI
10.1109/IEDM.1984.190647
Filename
1484418
Link To Document