• DocumentCode
    3556195
  • Title

    A study of avalanche breakdown in scaled n-MOSFETs

  • Author

    Laux, S.E. ; Gaensslen, F.

  • Author_Institution
    IBM T. J. Watson Research Center, Yorktown Heights, NY
  • Volume
    30
  • fYear
    1984
  • fDate
    1984
  • Firstpage
    84
  • Lastpage
    87
  • Abstract
    The behavior of channel breakdown in n-MOSFETs miniaturized by isothermal, constant field scaling is examined. Both a first-order analytical estimate and rigorous two-dimensional numerical simulation are used to understand the scaling of channel breakdown. A sublinear dependence of sustaining and snapback voltages on channel length is found and explained.
  • Keywords
    Algorithm design and analysis; Avalanche breakdown; Doping; Electric breakdown; Equations; Implants; Isothermal processes; MOSFET circuits; Numerical simulation; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1984 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1984.190648
  • Filename
    1484419