Title :
Planar processed polysilicon sealed cavities for pressure transducer arrays
Author :
Guckel, H. ; Burns, D.W.
Author_Institution :
University of Wisconsin, Madison, Wisconsin
Keywords :
Distortion measurement; Etching; Nickel; Optical arrays; Optical distortion; Pressure measurement; Semiconductor films; Semiconductor materials; Substrates; Transducers;
Conference_Titel :
Electron Devices Meeting, 1984 International
DOI :
10.1109/IEDM.1984.190686
