DocumentCode
3556233
Title
Planar processed polysilicon sealed cavities for pressure transducer arrays
Author
Guckel, H. ; Burns, D.W.
Author_Institution
University of Wisconsin, Madison, Wisconsin
Volume
30
fYear
1984
fDate
1984
Firstpage
223
Lastpage
225
Keywords
Distortion measurement; Etching; Nickel; Optical arrays; Optical distortion; Pressure measurement; Semiconductor films; Semiconductor materials; Substrates; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1984 International
Type
conf
DOI
10.1109/IEDM.1984.190686
Filename
1484457
Link To Document