• DocumentCode
    3556238
  • Title

    An isolation-merged vertical capacitor cell for large capacity DRAM

  • Author

    Nakajima, Shigeru ; Miura, Kenji ; Minegishi, Kazushige ; Morie, Takashi

  • Author_Institution
    Nippon Telegraph and Telephone Public Corporation, Kanagawa, Japan
  • Volume
    30
  • fYear
    1984
  • fDate
    1984
  • Firstpage
    240
  • Lastpage
    243
  • Abstract
    An isolation-merged vertical capacitor (IVEC) cell is described with emphasis on its scalability, simulated device characteristics and experimentally obtained capacitor oxide breakdown voltage. The IVEC cell size will be reduced to around 5 µm2by using the 0.5 µm rule process and trench depth of 2.2 µm. Capacitor oxide breakdown voltage is nearly the same with the conventional trench capacitor.
  • Keywords
    Capacitance; Capacitors; Electrodes; Etching; Laboratories; Random access memory; Scalability; Semiconductor films; Silicon; Telegraphy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1984 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1984.190691
  • Filename
    1484462
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3556238