Title :
Session 21 Computer automated manufacturing of integrated circuits
Author :
Shott, J. ; Reid, B.
Author_Institution :
Stanford University, Stanford, CA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1984 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1984.190773
