DocumentCode
3556339
Title
Effects of surface roughness in inversion layer transport
Author
Ferry, David K. ; Ferry, D.K.
Author_Institution
Arizona State University, Tempe, Arizona
Volume
30
fYear
1984
fDate
1984
Firstpage
605
Lastpage
608
Abstract
The effective mobility of electrons in the inverted Si
Keywords
Electron mobility; Logic circuits; Logic devices; Phonons; Rough surfaces; Scattering; Solid state circuits; Surface roughness; Temperature distribution; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1984 International
Type
conf
DOI
10.1109/IEDM.1984.190794
Filename
1484565
Link To Document