Title :
Effects of surface roughness in inversion layer transport
Author :
Ferry, David K. ; Ferry, D.K.
Author_Institution :
Arizona State University, Tempe, Arizona
Abstract :
The effective mobility of electrons in the inverted Si
Keywords :
Electron mobility; Logic circuits; Logic devices; Phonons; Rough surfaces; Scattering; Solid state circuits; Surface roughness; Temperature distribution; Voltage;
Conference_Titel :
Electron Devices Meeting, 1984 International
DOI :
10.1109/IEDM.1984.190794