Title :
Session 34 Device technology — SOI and 3-D technologies
Author :
Bartelink, D. ; Malhi, S.
Author_Institution :
Hewlett-Packard Laboratories, Palo Alto, CA, USA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1984 International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/IEDM.1984.190845
