DocumentCode

3556417

Title

A fully self-aligned stacked CMOS 64K SRAM

Author

Sundaresan, R. ; Malhi, S.D.S. ; Hite, L.R. ; Shah, A.H. ; Lam, H.W. ; Chatterjee, P.K.

Author_Institution

Texas Instruments Incorporated, Dallas, Texas

Volume

30

fYear

1984

fDate

1984

Firstpage

871

Lastpage

873

Keywords

Annealing; CMOS technology; Electrodes; Etching; Fabrication; Implants; Instruments; Plasma applications; Random access memory; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1984 International

Type

conf

DOI

10.1109/IEDM.1984.190871

Filename

1484642