Title :
Session 3 Device technology — Advanced interconnect and contact technologies
Author :
Parrillo, L. ; Chiu, Kenneth
Author_Institution :
Motorola Corporation
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1986 International
Conference_Location :
Los Angeles, CA, USA
DOI :
10.1109/IEDM.1986.191106
