DocumentCode

3556711

Title

Fabrication techniques for integrated sensor microstructures

Author

Guckel, H. ; Burns, D.W.

Author_Institution

University of Wisconsin, Madison, Wisconsin

Volume

32

fYear

1986

fDate

1986

Firstpage

176

Lastpage

179

Keywords

Capacitive sensors; Etching; Fabrication; Mechanical sensors; Microelectronics; Microstructure; Resistors; Silicon; Thermal resistance; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1986 International

Type

conf

DOI

10.1109/IEDM.1986.191143

Filename

1486401