DocumentCode
3556832
Title
Comparison and trends in today´s dominant E2technologies
Author
Lai, S.K. ; Dham, V.K. ; Guterman, D.
Author_Institution
Intel Corporation, Santa Clara, CA
Volume
32
fYear
1986
fDate
1986
Firstpage
580
Lastpage
583
Abstract
This paper reviews the three dominant E2technologies today, namely the two floating gate approaches of thin tunnel oxide and oxide of textured poly and the dual dielectric approach of MNOS. It evaluates each approach with respect to cell design, operation, manufacturability, compatibility with established process technologies and reliability. It follows with a comparison of the technologies in the areas of development entry cost, scaling and reliability. After a review of the market place, this paper concludes with a projection of the requirements of E2technologies to support full function, commodity E2memories E2PROM as well as low cost microcontrollers and ASIC (Application Specific Integrated Circuits).
Keywords
Costs; DH-HEMTs; Dielectrics; EPROM; Electrons; Manufacturing processes; Nonvolatile memory; Silicon compounds; Tunneling; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1986 International
Type
conf
DOI
10.1109/IEDM.1986.191256
Filename
1486514
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