Title :
A 10MHz integrated driver circuit for active-matrix LCDs using laser-recrystallized silicon TFTs
Author :
Fujii, E. ; Senda, K. ; Emoto, F. ; Ishihara, T. ; Kano, G.
Author_Institution :
Matsushita Electronics Corporation, Osaka, Japan
Abstract :
A monolithic integration of the horizontal driver circuit into the LCD substrate is demonstrated. The operation frequency of the TFT driver was elevated up to 10MHz by successful use of the laser-recrystallization technique. The horizontal driver circuit, of which the unit stage is composed of a D-flip flop shift register and 2- stage buffer amplifier, was fabricated on a quartz substrate together with the vertical driver and the active-matrix.
Keywords :
Active matrix liquid crystal displays; Driver circuits; Etching; Frequency; Grain size; Monolithic integrated circuits; Shift registers; Silicon; Substrates; Thin film transistors;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191455
