Title :
Characterization of Ta2O5-MgF2 composite thin films
Author :
Uk Ryu, Tae ; Jin Kim, Dong ; Hong Hahn, Sung ; Won Kim, Sok ; Jung Kim, Eui
Author_Institution :
Dept. of Phys., Ulsan Univ., South Korea
Abstract :
We deposited composite Ta2O5-MgF2 thin films by coevaporation, and explored their optical and mechanical properties. The refractive indices of pure Ta2O5 and MgF2 films were 1.94~2.15 and 1.38 at 550 nm wavelength, respectively. In the composite film system, the measured refractive index agreed well with the Lorentz-Lorenz formula and all films had tensile stress, in the range (0.7~3.1)×109 dyne/cm2, depending upon the film composition. The film stress did not vary linearly with the film composition
Keywords :
composite materials; electron beam deposition; internal stresses; magnesium compounds; optical films; refractive index; tantalum compounds; vacuum deposited coatings; 550 nm; Lorentz-Lorenz formula; MgF2; Ta2O5; Ta2O5-MgF2; coevaporation; composite thin films; film composition dependence; mechanical properties; optical properties; refractive indices; tensile stress; Composite materials; Optical films; Optical filters; Optical materials; Optical refraction; Optical sensors; Optical variables control; Refractive index; Tensile stress; Transistors;
Conference_Titel :
Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
Conference_Location :
Ulsan
Print_ISBN :
0-7803-6486-4
DOI :
10.1109/KORUS.2000.865930
