Title :
Session 22 Advanced IC interconnect technology
Author :
Ping Ko ; Wong, Simon
Author_Institution :
University of California, Berkeley, CA
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1987 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1987.191476
