Title :
Session 26 Device technology — Dielectrics and shallow junctions
Author :
Saks, N. ; Mochizuki, Takashi
Author_Institution :
Naval Research Laboratory
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1987 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1987.191488
