Title :
Observation of single electron trapping using scanning tunneling microscopy
Author :
Koch, R.H. ; Hamers, R.J.
Author_Institution :
IBM Thomas J. Watson Research Center, Yorktown Heights, NY
Keywords :
Current measurement; Density measurement; Electron traps; Rough surfaces; Scanning electron microscopy; Silicon; Surface resistance; Surface roughness; Surface topography; Tunneling;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191489