• DocumentCode
    3557177
  • Title

    Session 32 Device technology — Isolation & lithography

  • Author

    Sinha, Aloka ; Akasaka, Y.

  • Author_Institution
    SEMATECH/AT&T
  • fYear
    1987
  • fDate
    6-9 Dec. 1987
  • Firstpage
    731
  • Lastpage
    731
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1987 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1987.191534
  • Filename
    1487492
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3557177