DocumentCode

3557217

Title

Selective tungsten plugs on silicon for advanced CMOS devices

Author

Rana, V.V.S. ; Desko, J.C. ; Manocha, A.S. ; Lee, K.-H. ; Sinha, A.K.

Author_Institution

AT&T Bell Labs, Allentown, PA

Volume

33

fYear

1987

fDate

1987

Firstpage

862

Lastpage

864

Keywords

Aluminum; CMOS technology; Contact resistance; Electrical resistance measurement; Etching; Planarization; Plugs; Random access memory; Silicon; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1987 International

Type

conf

DOI

10.1109/IEDM.1987.191572

Filename

1487530