Title :
Selective tungsten plugs on silicon for advanced CMOS devices
Author :
Rana, V.V.S. ; Desko, J.C. ; Manocha, A.S. ; Lee, K.-H. ; Sinha, A.K.
Author_Institution :
AT&T Bell Labs, Allentown, PA
Keywords :
Aluminum; CMOS technology; Contact resistance; Electrical resistance measurement; Etching; Planarization; Plugs; Random access memory; Silicon; Tungsten;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191572
