DocumentCode

3557221

Title

Soft error rate of 64K SOI-DRAM

Author

Gotou, H. ; Arimoto, Y. ; Ozeki, M. ; Imaoka, K.

Author_Institution

Fujitsu, Ltd., Kanagawa, Japan

Volume

33

fYear

1987

fDate

1987

Firstpage

870

Lastpage

871

Keywords

Adhesives; Annealing; Error analysis; Fabrication; Grinding machines; Insulation; Random access memory; Substrates; Thickness measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1987 International

Type

conf

DOI

10.1109/IEDM.1987.191576

Filename

1487534