Current status and future trends of silicon microsensors

Author

de Rooij, Nico F.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

fYear

1991

fDate

24-27 June 1991

Firstpage

8

Lastpage

13

Abstract

Recent progress that has allowed the fabrication of silicon microsensors using procedures which are compatible with standard IC processes is reviewed. This will facilitate the integration of sensor and actuator units with their associated interface electronics, leading to microsystems. The importance of CAD (computer-aided design) is outlined. These developments are illustrated using examples of accelerometers, resonators, and chemical sensors. Some preliminary results of microsystems, especially regarding miniaturized chemical analysis systems, are discussed.<>

Keywords

accelerometers; chemical analysis; circuit CAD; crystal resonators; electric sensing devices; elemental semiconductors; insulated gate field effect transistors; integrated circuit technology; micromechanical devices; pressure transducers; silicon; CAD; ISFET; Si; accelerometers; actuator; chemical sensors; integration; interface electronics; microsystems; miniaturized chemical analysis; pressure sensor; resonators; sensor; standard IC processes; tuning forks; Accelerometers; Actuators; Anisotropic magnetoresistance; Chemical sensors; Design automation; Dry etching; Fabrication; Micromachining; Microsensors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148785

Filename

148785