Title :
Current status and future trends of silicon microsensors
Author :
de Rooij, Nico F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
Recent progress that has allowed the fabrication of silicon microsensors using procedures which are compatible with standard IC processes is reviewed. This will facilitate the integration of sensor and actuator units with their associated interface electronics, leading to microsystems. The importance of CAD (computer-aided design) is outlined. These developments are illustrated using examples of accelerometers, resonators, and chemical sensors. Some preliminary results of microsystems, especially regarding miniaturized chemical analysis systems, are discussed.<>
Keywords :
accelerometers; chemical analysis; circuit CAD; crystal resonators; electric sensing devices; elemental semiconductors; insulated gate field effect transistors; integrated circuit technology; micromechanical devices; pressure transducers; silicon; CAD; ISFET; Si; accelerometers; actuator; chemical sensors; integration; interface electronics; microsystems; miniaturized chemical analysis; pressure sensor; resonators; sensor; standard IC processes; tuning forks; Accelerometers; Actuators; Anisotropic magnetoresistance; Chemical sensors; Design automation; Dry etching; Fabrication; Micromachining; Microsensors; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148785
