Title :
Micro flow sensor and integrated magnetic oxygen sensor using it
Author_Institution :
Dept. of Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro thermal flow sensor. The flow sensor and the micro valve will be applied in integrated gas control systems.<>
Keywords :
electric sensing devices; flow measurement; flowmeters; integrated circuit technology; oxygen; O/sub 2/; differential heaters; fabrication; gas control; integrated sensor; magnetic sensor; micro bridge heater; micro valve; micromachining; paramagnetic sensor; thermal capacity; thermal micro mass flow sensor; thermal time constant; Etching; Gas detectors; Glass; Magnetic sensors; Oxygen; Silicon compounds; Structural beams; Temperature sensors; Thermal sensors; Thick film sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148791
