Title :
A Study of MIS - AlGaN/GaN HEMTs with SiO2 Films as Gate Insulator
Author :
Sugimoto, M. ; Kodama, M. ; Soejima, N. ; Hayashi, E. ; Uesugi, T. ; Kachi, T.
Keywords :
Aluminum gallium nitride; Capacitance-voltage characteristics; Density measurement; Electrodes; Energy measurement; Gallium nitride; HEMTs; Insulation; Interface states; MODFETs;
Conference_Titel :
Power Semiconductor Devices and ICs, 2005. Proceedings. ISPSD '05. The 17th International Symposium on
Print_ISBN :
0-7803-8890-9
DOI :
10.1109/ISPSD.2005.1488012