Motion investigation of electrostatic servo-accelerometers by means of transparent ITO fixed electrodes

Author

Kloeck, B. ; Suzuki, S. ; Tsuchitani, S. ; Miki, M. ; Matsumoto, M. ; Sato, K. ; Koide, A. ; Sugisawa, Y.

Author_Institution

Hitachi Ltd., Ibaraki, Japan

fYear

1991

fDate

24-27 June 1991

Firstpage

108

Lastpage

111

Abstract

The authors introduce a novel thin film material for sensors and actuators: indium tin oxide (ITO). ITO has the unique feature of combining low electrical resistivity and high visual transparency. Thin ITO films were deposited by DC-sputtering to form the fixed electrodes of a capacitive servo-accelerometer. Since the movable electrode of the accelerometer is visible during real operation of the sensor, its behavior can be studied under various conditions. One investigation presented is a study of the motion of the movable electrode at high electrostatic voltages, and its effect on the measurement range of the sensor. The benefits of ITO for mass production are illustrated by means of the evaluation of the temperature behavior of the accelerometers.<>

Keywords

accelerometers; electric actuators; electronic equipment manufacture; electrostatic devices; indium compounds; micromechanical devices; servomechanisms; sputtered coatings; sputtering; DC-sputtering; In/sub 2-x/Sn/sub x/O/sub 3-y/; actuators; capacitive servo-accelerometer; electrical resistivity; electrostatic servo-accelerometers; fixed electrodes; fringe lines; impact testing; mass production; movable electrode; parallelogram actuator; sensors; temperature behavior; thin film material; transparent ITO fixed electrodes; visual transparency; Accelerometers; Actuators; Electric resistance; Electrodes; Electrostatic measurements; Indium tin oxide; Mass production; Motion measurement; Thin film sensors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148812

Filename

148812