DocumentCode
3557585
Title
Investigation of pulsed laser annealing (PLA) and rapid thermal annealing (RTA) of CIGS films and solar cells
Author
Wang, Xuege ; Li, Sheng S. ; Craciun, V. ; Kim, W.K. ; Yoon, S. ; Howard, J.M. ; Manasreh, O. ; Venturini, J. ; Crisalle, D. ; Anderson, T.J.
Author_Institution
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA
fYear
2005
fDate
3-7 Jan. 2005
Firstpage
394
Lastpage
397
Abstract
Studies of the effect of pulsed laser annealing (PLA) and rapid thermal annealing (RTA) on Cu(In,Ga)Se2 (CIGS) films and devices under various annealing conditions are reported in this paper. Several characterizations were carried out before and after each annealing. The results show that both of these two techniques could positively benefit the CIGS film properties and device performance.
Keywords
copper compounds; gallium compounds; indium compounds; laser beam annealing; rapid thermal annealing; semiconductor thin films; solar cells; ternary semiconductors; thin film devices; CIGS film properties; CIGS solar cells; Cu(InGa)Se2; device performance; pulsed laser annealing; rapid thermal annealing; Atomic beams; Optical pulses; Photovoltaic cells; Programmable logic arrays; Rapid thermal annealing; Rapid thermal processing; Silicon; Surface emitting lasers; Surface morphology; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE
ISSN
0160-8371
Print_ISBN
0-7803-8707-4
Type
conf
DOI
10.1109/PVSC.2005.1488152
Filename
1488152
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