Novel Twin Poly-Si Thin-Film Transistors EEPROM With Trigate Nanowire Structure

This letter demonstrates a novel twin poly-Si thin-film transistor (TFT) electrical erasable PROM (EEPROM) that utilizes trigate nanowires (NWs). The NW TFT EEPROM has superior gate control because its trigate structure provides a higher memory window and program/erase (P/E) efficiency over those of a single-channel one. For endurance and retention, the memory window can be maintained at 1.5 V after 10³ P/E cycles and 25% charge loss for ten years of NW twin poly-Si EEPROM. This investigation explores its feasibility in future active matrix liquid crystal display system-on-panel and 3-D stacked Flash memory applications.