Liquid Operation of Silicon Microcantilever Heaters

Author

Lee, Jungchul ; King, William P.

Author_Institution

Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL

Volume

8

Issue

11

fYear

2008

Firstpage

1805

Lastpage

1806

Abstract

This letter reports characterization and calibration of silicon microcantilever heaters for operation in liquid environments. Cantilever thermomechanical noise spectra were measured in air and in water using a commercial atomic force microscope. Cantilever electrical characteristics were measured in air and water. Laser Raman thermometry measured cantilever temperature in air and water, allowing temperature calibration through comparison with electrical characteristics. Cantilever thermal conductance in water was 136-610 W/K, depending upon the cantilever type. The cantilever electrical resistance is an accurate measure of cantilever temperature in both air and water.

Keywords

atomic force microscopy; cantilevers; electric resistance measurement; heating elements; measurement by laser beam; micromechanical devices; silicon; temperature measurement; thermal conductivity; Si; atomic force microscope; electrical characteristics; electrical resistance; laser Raman thermometry; liquid operation; silicon microcantilever heater; temperature measurement; thermal conductance; thermomechanical noise spectra; Atomic force microscopy; Atomic measurements; Calibration; Electric variables; Electric variables measurement; Electrical resistance measurement; Force measurement; Silicon; Temperature measurement; Water; Laser Raman thermometry; liquid operation; microcantilever; microcantilever heater; resistive thermometer;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2008.2005159

Filename

4655544