Title :
Microstructural, Magnetic and Microwave Properties of Large Area BaFe
O
Thick Films
Author :
Chen, Yajie ; Smith, Ian C. ; Geiler, Anton L. ; Vittoria, Carmine ; Zagorodnii, Volodymyr ; Celinski, Zbigniew ; Harris, Vincent G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA
Abstract :
We have demonstrated the feasibility of thick BaFe12O19 ceramic films fabricated on silicon (100) substrates. We obtained large area (1-in diameter) thick films (100-200 mum) by using a screen printing technique and amorphous SiO2 or Al2O3 buffer layers. To characterize the microstructural, magnetic, and microwave properties of ferrite films, we employed X-ray diffractometry, scanning electron microscopy, energy dispersive X-ray spectroscopy, dc magnetometry, and ferromagnetic resonance (FMR). We placed our emphasis on investigating silicon diffusion in terms of a depth analysis of composition for different buffer layers. We present and discuss FMR measurements for two polycrystalline samples with different buffer layers. We find that a-Al2O3 is superior to a-SiO2 as a buffer layer in achieving a tradeoff between magnetic and mechanical properties.
Keywords :
X-ray chemical analysis; X-ray diffraction; alumina; barium compounds; ceramics; coercive force; crystal microstructure; diffusion; ferrites; ferromagnetic resonance; magnetic anisotropy; magnetic thin films; microwave materials; scanning electron microscopy; silicon; silicon compounds; Al2O3-Si; BaFe12O19; Si; SiO2-Si; X-ray diffractometry; amorphous buffer layers; coercivity; dc magnetometry; depth analysis; energy dispersive X-ray spectroscopy; ferrite films; ferromagnetic resonance; magnetic anisotropy; magnetization; microstructural properties; microwave properties; polycrystalline samples; scanning electron microscopy; screen printing technique; silicon (100) substrates; silicon diffusion; size 100 mum to 200 mum; thick ceramic films; Hexaferrite; microwave; screen printing; silicon;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2008.2002573