Title :
The Role of Preoxidation on the Interface Structure of Co/MgO Multilayers
Author :
Eastwood, David S. ; Egelhoff, William F., Jr. ; Tanner, Brian K.
Author_Institution :
Dept. of Phys., Durham Univ., Durham
Abstract :
It has previously been reported that preoxidation of the bottom electrode prior to deposition of the Al 2 O 3 or MgO barrier in magnetic tunnel junctions acts to suppress orange-peel coupling between Co electrodes. Here, we present specular and diffuse X-ray scattering measurements from Co/MgO multilayer repeat structures which suggest that this drop arises from a reduction in the in-plane correlation length of the roughness at the electrode-barrier interface rather than reduction in roughness amplitude.
Keywords :
X-ray scattering; cobalt; interface roughness; magnesium compounds; magnetic multilayers; oxidation; Co-MgO; bottom electrode; diffuse X-ray scattering; interface structure; magnetic tunnel junctions; multilayer repeat structures; preoxidation; roughness in-plane correlation length; specular X-ray scattering; Grazing incidence X-ray scattering; multilayers; orange-peel coupling; preoxidation;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2008.2003243