DocumentCode :
3560060
Title :
Micro Hysteresis Sensor for Wafer Level Testing of Magnetic Films
Author :
Flick, Eva ; Feindt, Karsten ; Gatzen, Hans Heinrich
Author_Institution :
Center for Production Technol., Leibniz Univ. Hannover, Garbsen
Volume :
44
Issue :
11
fYear :
2008
Firstpage :
3973
Lastpage :
3976
Abstract :
To guarantee a successful fabrication of magnetic micro devices, attaining the desired properties of magnetic thin-films is a precondition. This is particularly true for anisotropic magnetic films. This paper presents the development and fabrication of a micro hysteresis sensor chip consisting of two independent sensors oriented perpendicular to each other. Such an approach allows measuring the properties of anisotropic magnetic thin-films along the two desired axes. The paper describes design, fabrication, and evaluation of the micro hysteresis sensor.
Keywords :
magnetic hysteresis; magnetic sensors; magnetic thin film devices; microsensors; thin film sensors; anisotropic magnetic thin-films; magnetic microdevices; microhysteresis sensor chip fabrication; microhysteresis sensor design; microhysteresis sensor evaluation; wafer level testing; $BH$-loop; magnetic MEMS; micro hysteresis sensor; thin-film technology;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2008.2002535
Filename :
4717394
Link To Document :
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