Title :
Micro Hysteresis Sensor for Wafer Level Testing of Magnetic Films
Author :
Flick, Eva ; Feindt, Karsten ; Gatzen, Hans Heinrich
Author_Institution :
Center for Production Technol., Leibniz Univ. Hannover, Garbsen
Abstract :
To guarantee a successful fabrication of magnetic micro devices, attaining the desired properties of magnetic thin-films is a precondition. This is particularly true for anisotropic magnetic films. This paper presents the development and fabrication of a micro hysteresis sensor chip consisting of two independent sensors oriented perpendicular to each other. Such an approach allows measuring the properties of anisotropic magnetic thin-films along the two desired axes. The paper describes design, fabrication, and evaluation of the micro hysteresis sensor.
Keywords :
magnetic hysteresis; magnetic sensors; magnetic thin film devices; microsensors; thin film sensors; anisotropic magnetic thin-films; magnetic microdevices; microhysteresis sensor chip fabrication; microhysteresis sensor design; microhysteresis sensor evaluation; wafer level testing; $BH$-loop; magnetic MEMS; micro hysteresis sensor; thin-film technology;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2008.2002535