A Novel Approach to Extending the Linearity Range of Displacement Inductive Sensor

This paper presents a meander-type displacement inductive sensor, usable for the detection of small displacements (less than 0.5 mm) in the plane. It also describes design, realization, and the input inductance measurement of sensor. A displacement in two directions can be detected by using two sensor elements, each having a pair of meander coils. In each pair, one of the coils is fixed and between its terminals the input inductance was measured, while the other coil is short-circuited. If one coil is moved above the other, in directions of x - and z -axes, coupling between the coils will change, as well as the input inductance, which serves as a measure of displacement. In order to achieve better linearity of the sensor, longitudinal gaps are inserted in the middle of each conductive segment of one fixed coil. Four sets of inductive sensors were realized: without gap and with three different gaps. Planar, low-cost PCB technology was chosen for our prototype. In addition, an improved model of the inductive sensor is proposed. The input inductance of displacement sensor was calculated and compared with measured values. A good agreement was found.