Fe-Pt Thick Film Magnets Prepared by High-Speed PLD Method

Fe₅₀ Pt₅₀ film magnets were prepared by the pulsed laser deposition (PLD) method under the high deposition rate. Increase in a laser power enabled us to increase the deposition rate and obtain Fe-Pt thick films with good mechanical properties. The maximum deposition rate of 50mu m/h can be achieved at the laser power of 9 W. Although a substrate heating system was not comprised in our PLD apparatus, the substrate temperature showed higher than 673 K as the laser power exceeded 5 W. In the as-deposited films prepared under the laser power ranging between 5 and 9 W, order-disorder transformation occurred and the values of coercivity of the samples became higher than 400 kA/m.