Six-Degree-of-Freedom Motion Analysis of a Planar Actuator With a Magnetically Levitated Mover by Six-Phase Current Controls

Planar actuators have high-performance drive with multi-degrees of freedom. This study involves a planar actuator with a small mover capable of traveling over large displacements. This paper proposes six-armature currents control to levitate the mover and to control the large translational and the yaw motions above a plane, and describes numerical analysis results of the six-degree-of-freedom motion characteristics. The numerical analysis results indicate that the mover can be levitated stably and travel over large displacements above the plane with less interference to the vertical and yaw motions.