Title :
Capacitive Pressure Sensor With Very Large Dynamic Range
Author :
Bakhoum, Ezzat G. ; Cheng, Marvin H M
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA
fDate :
3/1/2010 12:00:00 AM
Abstract :
A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.
Keywords :
capacitance; capacitive sensors; electrodes; pressure sensors; capacitance; capacitive pressure sensor; electrode surface area; interelectrode spacing; sensor dynamic range; Capacitive pressure sensor; pressure sensor; sensor dynamic range;
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
Conference_Location :
10/13/2009 12:00:00 AM
DOI :
10.1109/TCAPT.2009.2022949
