DocumentCode
3560544
Title
Capacitive Pressure Sensor With Very Large Dynamic Range
Author
Bakhoum, Ezzat G. ; Cheng, Marvin H M
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA
Volume
33
Issue
1
fYear
2010
fDate
3/1/2010 12:00:00 AM
Firstpage
79
Lastpage
83
Abstract
A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.
Keywords
capacitance; capacitive sensors; electrodes; pressure sensors; capacitance; capacitive pressure sensor; electrode surface area; interelectrode spacing; sensor dynamic range; Capacitive pressure sensor; pressure sensor; sensor dynamic range;
fLanguage
English
Journal_Title
Components and Packaging Technologies, IEEE Transactions on
Publisher
ieee
Conference_Location
10/13/2009 12:00:00 AM
ISSN
1521-3331
Type
jour
DOI
10.1109/TCAPT.2009.2022949
Filename
5286838
Link To Document