Title :
Electron Current From an RF Microdielectric Barrier Discharge
Author :
Wang, Jun-Chieh ; Leoni, Napoleon ; Birecki, Henryk ; Gila, Omer ; Kushner, Mark J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Nonarcing microdielectric barrier discharges (mDBDs) using radio-frequency excitation are attractive in that the arrays of devices can be inexpensively produced to generate surface sources of plasma or radicals. Images of the time evolution of electron extraction from an mDBD sustained in atmospheric-pressure N2 are presented.
Keywords :
high-frequency discharges; nitrogen; plasma dielectric properties; plasma sources; plasma transport processes; N2; atmospheric-pressure N2; electron current; electron extraction; nonarcing microdielectric barrier discharges; pressure 1 atm; radiofrequency excitation; surface sources; Cavity resonators; Dielectrics; Discharges; Electric potential; Electrodes; Plasmas; Radio frequency; Dielectric barrier discharge; microplasma;
Journal_Title :
Plasma Science, IEEE Transactions on
Conference_Location :
4/21/2011 12:00:00 AM
DOI :
10.1109/TPS.2011.2126606
