Robust adaptive vibration tracking control for a micro-electro-mechanical systems vibratory gyroscope with bound estimation

This study presents an adaptive sliding mode controller for a micro-electro-mechanical systems (MEMS) z-axis vibratory gyroscope. The adaptive model reference state tracking control with sliding mode controller is developed to estimate the angular velocity, the damping and stiffness coefficients of MEMS vibratory gyroscope in real time. An adaptive controller that can estimate the unknown upper bound of the parameter uncertainties and external disturbance is derived and the stability of the closed-loop system is established. The adaptive sliding mode controller is designed so that the trajectory of the driving axes can track the state of the reference vibration model. The effectiveness of the proposed scheme is demonstrated through numerical simulations on an MEMS vibratory gyroscope.