• DocumentCode
    3561374
  • Title

    Wettability of Amorphous Diamond-Like Carbons Deposited on Si and PMMA in Pulse-Modulated Plasmas

  • Author

    Sung, Ta-Lun ; Yang, Jason Hsiao-Chun ; Teii, Kungen ; Teii, Shinriki ; Liu, Chung-Ming ; Tseng, Wan-Yu ; Lin, Li-Deh ; Ono, Shigeru

  • Author_Institution
    Dept. of Chem. & Mater. Eng., Lunghwa Univ. of Sci. & Technol., Taoyuan, Taiwan
  • Volume
    40
  • Issue
    7
  • fYear
    2012
  • fDate
    7/1/2012 12:00:00 AM
  • Firstpage
    1837
  • Lastpage
    1842
  • Abstract
    Pulse-modulated direct-current methane plasmas are used to deposit amorphous diamond-like carbon films on Si and dentistry-use polymethyl methacrylate (PMMA) substrates as a function of the negative pulse voltage applied to the substrate (Vmax). The films on PMMA show a transition from diamond-like to more graphitic carbon in the Raman spectra with increasing Vmax, dissimilar to those on Si. This is attributed to easy deformation of PMMA, leading to the low compressive stress of the films (1 to 2 GPa). The contact angle of water for the films on both Si and PMMA is large, ranging from 79° to 94° almost independent of Vmax, confirming that the films are hydrophobic despite the difference in carbon bonding state. The large dispersion component (41-43 mJ/m2) of the surface free energy of the films measured from the contact angle of water and 1-bromonaphthalene indicates the high mass density of the films. The small polar component (0.2-3.5 mJ/m2) is attributed to hydrogen saturation of the surface sites forming nonpolar C-H bonds and, thus, responsible for the hydrophobic behavior.
  • Keywords
    Raman spectra; amorphous state; bonds (chemical); compressive strength; contact angle; deformation; diamond-like carbon; disperse systems; free energy; hydrophobicity; plasma deposition; surface energy; thin films; wetting; 1-bromonaphthalene; C; PMMA deformation; Raman spectra; Si; Si substrate; amorphous diamond-like carbon film deposition; carbon bonding state; compressive stress; contact angle; dentistry-use polymethyl methacrylate substrate; dispersion component; film transition; graphitic carbon films; hydrogen saturation; hydrophobic films; mass density; negative pulse voltage; nonpolar C-H bonds; polar component; pulse-modulated direct-current methane plasmas; surface free energy; surface sites; wettability; Carbon; Diamond-like carbon; Plasmas; Rough surfaces; Silicon; Substrates; Surface roughness; Amorphous carbon; biomedical coating; chemical vapor deposition (CVD); diamond-like carbon (DLC); optical emission; polymethyl methacrylate (PMMA); pulse; wettability;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • Conference_Location
    5/23/2012 12:00:00 AM
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2012.2196057
  • Filename
    6204101