Title :
Radon-Transform-Based Image Enhancement for Microelectronic Chip Inspection
Author :
Gur, Eran ; Weizman, Yoav ; Perdu, Philippe ; Zalevsky, Zeev
Author_Institution :
Shenkar Coll. of Eng. & Design, Ramat Gan, Israel
Abstract :
In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.
Keywords :
Radon transforms; VLSI; circuit analysis computing; failure analysis; image enhancement; image resolution; inspection; integrated circuit reliability; iterative methods; Radon transform; failure analysis; high-resolution layout image; image enhancement; low-resolution images; microelectronic chip inspection; numerical iterative approach; region of interest; Failure analysis; Gallium nitride; Image enhancement; Image resolution; Inspection; Microelectronics; Optical diffraction; Photonic band gap; Silicon; Spatial resolution; Circuit analysis; Radon transform; failure analysis; image processing; image resolution;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
Conference_Location :
7/8/2010 12:00:00 AM
DOI :
10.1109/TDMR.2010.2056373
