Radon-Transform-Based Image Enhancement for Microelectronic Chip Inspection

Author

Gur, Eran ; Weizman, Yoav ; Perdu, Philippe ; Zalevsky, Zeev

Author_Institution

Shenkar Coll. of Eng. & Design, Ramat Gan, Israel

Volume

10

Issue

3

fYear

2010

Firstpage

403

Lastpage

408

Abstract

In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

Keywords

Radon transforms; VLSI; circuit analysis computing; failure analysis; image enhancement; image resolution; inspection; integrated circuit reliability; iterative methods; Radon transform; failure analysis; high-resolution layout image; image enhancement; low-resolution images; microelectronic chip inspection; numerical iterative approach; region of interest; Failure analysis; Gallium nitride; Image enhancement; Image resolution; Inspection; Microelectronics; Optical diffraction; Photonic band gap; Silicon; Spatial resolution; Circuit analysis; Radon transform; failure analysis; image processing; image resolution;

fLanguage

English

Journal_Title

Device and Materials Reliability, IEEE Transactions on

Publisher

ieee

Conference_Location

7/8/2010 12:00:00 AM

ISSN

1530-4388

Type

jour

DOI

10.1109/TDMR.2010.2056373

Filename

5504072